Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825133 | Use of fluorine implantation to form a charge balanced nitrided gate dielectric layer | Shyue-Shyh Lin | 2004-11-30 |
| 6818553 | Etching process for high-k gate dielectrics | Yuan-Hung Chiu | 2004-11-16 |
| 6767847 | Method of forming a silicon nitride-silicon dioxide gate stack | Chien-Ming Hu, Chien-Hao Chen, Shih-Chang Chen, Mong-Song Liang | 2004-07-27 |
| 6764959 | Thermal compensation method for forming semiconductor integrated circuit microelectronic fabrication | Shih-Chang Chen, Chen-Hua Yu | 2004-07-20 |
| 6759302 | Method of generating multiple oxides by plasma nitridation on oxide | Chia-Lin Chen, Chien-Hao Chen | 2004-07-06 |
| 6689665 | Method of forming an STI feature while avoiding or reducing divot formation | Syun-Ming Jang | 2004-02-10 |