Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734967 | Focused beam spectroscopic ellipsometry method and system | Timothy R. Piwonka-Corle, Karen Scoffone, Xing Chen, Lloyd J. LaComb, JR., Dorian Zahorski +1 more | 2004-05-11 |
| 6687002 | Method and apparatus for ellipsometric metrology for a sample contained in a chamber or the like | Pierre Boher | 2004-02-03 |