Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6734967 | Focused beam spectroscopic ellipsometry method and system | Timothy R. Piwonka-Corle, Karen Scoffone, Xing Chen, Jean-Louis Stehle, Dorian Zahorski +1 more | 2004-05-11 |