Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815633 | Inductively-coupled toroidal plasma source | William M. Holber, Andrew Cowe, Eric Georgelis, Ilya M. Bystyak, Andrzej Bortkiewicz | 2004-11-09 |
| 6734967 | Focused beam spectroscopic ellipsometry method and system | Timothy R. Piwonka-Corle, Karen Scoffone, Lloyd J. LaComb, JR., Jean-Louis Stehle, Dorian Zahorski +1 more | 2004-05-11 |