Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6819423 | High spatial resolution infrared ellipsometer | Jean-Louise Stehle, Michel Luttmann | 2004-11-16 |
| 6687002 | Method and apparatus for ellipsometric metrology for a sample contained in a chamber or the like | Jean-Louis Stehle | 2004-02-03 |