Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6787285 | Pattern width slimming-inhibiting method of photoresist pattern using photoresist composition containing thermal acid generator | Gyu-Dong Park, Jae Chang Jung, Ki Soo Shin | 2004-09-07 |
| 6770720 | Organic polymer for organic anti-reflective coating layer and preparation thereof | Jae Chang Jung, Min Ho Jung, Sung-Eun Hong, Ki Ho Baik | 2004-08-03 |
| 6764806 | Over-coating composition for photoresist, and processes for forming photoresist patterns using the same | Jae Chang Jung, Cha-Won Koh, Jin-Soo Kim, Ki Ho Baik | 2004-07-20 |
| 6703323 | Method of inhibiting pattern collapse using a relacs material | Sung Koo Lee | 2004-03-09 |