Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6803637 | Micromechanical component with different doping types so that one type is anodized into porous silicon | Hubert Benzel, Heribert Weber, Frank Schaefer | 2004-10-12 |
| 6759265 | Method for producing diaphragm sensor unit and diaphragm sensor unit | Thorsten Pannek | 2004-07-06 |
| 6726815 | Electrochemical etching cell | Wilhelm Frey, Franz Laermer | 2004-04-27 |
| 6677249 | Method for manufacturing breakaway layers for detaching deposited layer systems | Franz Laermer, Wilhelm Frey | 2004-01-13 |