Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6759265 | Method for producing diaphragm sensor unit and diaphragm sensor unit | Hans Artmann | 2004-07-06 |
| 6746932 | Method of reducing the thickness of a silicon substrate | — | 2004-06-08 |