Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6832523 | Micromechanical component and manufacturing method | Hubert Benzel, Frank Schaefer | 2004-12-21 |
| 6820481 | Mass flow sensor having an improved membrane stability | Werner Steiner | 2004-11-23 |
| 6803637 | Micromechanical component with different doping types so that one type is anodized into porous silicon | Hubert Benzel, Hans Artmann, Frank Schaefer | 2004-10-12 |