Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6832523 | Micromechanical component and manufacturing method | Hubert Benzel, Heribert Weber | 2004-12-21 |
| 6803637 | Micromechanical component with different doping types so that one type is anodized into porous silicon | Hubert Benzel, Heribert Weber, Hans Artmann | 2004-10-12 |