Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6825057 | Thermal membrane sensor and method for the production thereof | Klaus Heyers | 2004-11-30 |
| 6808640 | Micromechanical part and method for its manufacture | Frank Fischer | 2004-10-26 |
| 6790699 | Method for manufacturing a semiconductor device | Heinz-Georg Vossenberg | 2004-09-14 |
| 6726815 | Electrochemical etching cell | Hans Artmann, Franz Laermer | 2004-04-27 |
| 6677249 | Method for manufacturing breakaway layers for detaching deposited layer systems | Franz Laermer, Hans Artmann | 2004-01-13 |
| 6672732 | Micromechanical oscillating device | Andreas Niendorf, Karsten Funk | 2004-01-06 |