Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6808640 | Micromechanical part and method for its manufacture | Wilhelm Frey | 2004-10-26 |
| 6739193 | Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same | Jochen Franz, Matthias Illing, Frank Henning, Peter Hein | 2004-05-25 |
| 6686638 | Micromechanical component including function components suspended movably above a substrate | Lars Metzger | 2004-02-03 |
| 6679995 | Method of micromechanical manufacturing of a semiconductor element, in particular an acceleration sensor | Branko Banjac, Doris Schielein, Dirk Bueche | 2004-01-20 |