Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6739193 | Micromechanical structure, in particular for an acceleration sensor or yaw rate sensor and a corresponding method for producing the same | Jochen Franz, Matthias Illing, Frank Fischer, Peter Hein | 2004-05-25 |