Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6836324 | Method and apparatus for measurements of patterned structures | Vladimir Machavariani | 2004-12-28 |
| 6815947 | Method and system for thickness measurements of thin conductive layers | Yoav Many, Rahamin Guliamov, Shahar Gov | 2004-11-09 |
| 6801315 | Method and system for overlay measurement | Moshe Finarov | 2004-10-05 |
| 6801326 | Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects | Moshe Finarov, Avi Ravid | 2004-10-05 |