Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833048 | Apparatus for in-cassette monitoring of semiconductor wafers | Rani Kipper | 2004-12-21 |
| 6806971 | Method and apparatus for process control in semiconductor manufacture | — | 2004-10-19 |
| 6801315 | Method and system for overlay measurement | David Scheiner | 2004-10-05 |
| 6801326 | Method and apparatus for monitoring a chemical mechanical planarization process applied to metal-based patterned objects | David Scheiner, Avi Ravid | 2004-10-05 |
| 6791686 | Apparatus for integrated monitoring of wafers and for process control in the semiconductor manufacturing and a method for use thereof | — | 2004-09-14 |
| 6764379 | Method and system for endpoint detection | — | 2004-07-20 |
| 6752689 | Apparatus for optical inspection of wafers during polishing | — | 2004-06-22 |
| 6733619 | Apparatus for integrated monitoring of wafers and for process control in semiconductor manufacturing and a method for use thereof | — | 2004-05-11 |
| 6720568 | Method and system for optical inspection of a structure formed with a surface relief | Yoel Cohen | 2004-04-13 |