Issued Patents 2004
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6788385 | Stage device, exposure apparatus and method | Keiichi Tanaka, Robert Martinek, Andrew J. Hazelton | 2004-09-07 |
| 6758313 | Method and apparatus for operating a vibration isolation system having electronic and pneumatic control systems | — | 2004-07-06 |
| 6750625 | Wafer stage with magnetic bearings | Kazuya Ono, Andrew J. Hazelton | 2004-06-15 |
| 6734947 | Quick chamber seals | Douglas C. Watson | 2004-05-11 |
| 6686991 | Wafer stage assembly, servo control system, and method for operating the same | Toshio Ueta | 2004-02-03 |
| 6678038 | Apparatus and methods for detecting tool-induced shift in microlithography apparatus | — | 2004-01-13 |