Issued Patents 2004
Showing 1–16 of 16 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835941 | Stage unit and its making method, and exposure apparatus and its making method | — | 2004-12-28 |
| 6819404 | Stage device and exposure apparatus | — | 2004-11-16 |
| 6811962 | Method for developing processing and apparatus for supplying developing solution | Kousuke Yoshihara, Taro Yamamoto, Hideharu Kyouda, Hirofumi Takeguchi, Atsushi Ookouchi | 2004-11-02 |
| 6801289 | Liquid crystal display device | Hideki Ichioka, Tomohiko Yamamoto, Naoto Inoue, Koji Fujiwara | 2004-10-05 |
| 6791634 | Display device having connecting pads crossing a spare line | Hideki Ichioka, Tomohiko Yamamoto, Naoto Inoue, Koji Fujiwara | 2004-09-14 |
| 6786632 | Calorimeter and manufacturing method thereof | Toshimitsu Morooka | 2004-09-07 |
| 6788385 | Stage device, exposure apparatus and method | Michael Binnard, Robert Martinek, Andrew J. Hazelton | 2004-09-07 |
| 6781669 | Methods and apparatuses for substrate transporting, positioning, holding, and exposure processing, device manufacturing method and device | — | 2004-08-24 |
| 6770890 | Stage devices including linear motors that produce reduced beam-perturbing stray magnetic fields, and charged-particle-beam microlithography systems comprising same | — | 2004-08-03 |
| 6750571 | Magnetically shielded linear motors, and stage apparatus comprising same | Ryuichirou Tominaga, Masafumi Tamai | 2004-06-15 |
| 6726356 | Calorimeter | Toshimitsu Morooka | 2004-04-27 |
| 6724359 | Electronic device and method for driving the same | Tomohiko Yamamoto, Hideki Ichioka, Naoto Inoue, Koji Fujiwara | 2004-04-20 |
| 6720680 | Flat motor device and its driving method, stage device and its driving method, exposure apparatus and exposure method, and device and its manufacturing method | — | 2004-04-13 |
| 6721041 | Stage device and exposure apparatus | — | 2004-04-13 |
| 6693284 | Stage apparatus providing multiple degrees of freedom of movement while exhibiting reduced magnetic disturbance of a charged particle beam | — | 2004-02-17 |
| 6674085 | Gas-actuated stages including reaction-force-canceling mechanisms for use in charged-particle-beam microlithography systems | Takaharu Miura | 2004-01-06 |