Issued Patents 2004
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6809323 | Isolated frame caster | — | 2004-10-26 |
| 6801300 | System and method for switching position signals during servo control of a device table | John A. Peterson, Gabor Szoboszlay | 2004-10-05 |
| 6788385 | Stage device, exposure apparatus and method | Keiichi Tanaka, Michael Binnard, Robert Martinek | 2004-09-07 |
| 6757053 | Stage assembly including a reaction mass assembly | Mike Binnard | 2004-06-29 |
| 6750625 | Wafer stage with magnetic bearings | Michael Binnard, Kazuya Ono | 2004-06-15 |
| 6724466 | Stage assembly including a damping assembly | Kazuya Ono | 2004-04-20 |
| 6724000 | Reaction frame apparatus and method | — | 2004-04-20 |
| 6686990 | Scanning exposure method with reduced time between scans | Bausan Yuan | 2004-02-03 |