Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750625 | Wafer stage with magnetic bearings | Michael Binnard, Andrew J. Hazelton | 2004-06-15 |
| 6724466 | Stage assembly including a damping assembly | Andrew J. Hazelton | 2004-04-20 |
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6750625 | Wafer stage with magnetic bearings | Michael Binnard, Andrew J. Hazelton | 2004-06-15 |
| 6724466 | Stage assembly including a damping assembly | Andrew J. Hazelton | 2004-04-20 |