Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815695 | Simplified reticle stage removal system for an electron beam system | W. Thomas Novak | 2004-11-09 |
| 6794660 | Long stroke mover for a stage assembly | — | 2004-09-21 |
| 6774981 | Modular exposure apparatus with removable optical device and improved isolation of the optical device | Alton H. Phillips | 2004-08-10 |
| 6756706 | Method and apparatus for cooling power supply wires used to drive stages in electron beam lithography machines | — | 2004-06-29 |
| 6735867 | Method of making a static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda +1 more | 2004-05-18 |
| 6734947 | Quick chamber seals | Michael Binnard | 2004-05-11 |
| 6731372 | Multiple chamber fluid mount | Mike Binnard | 2004-05-04 |