Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6815695 | Simplified reticle stage removal system for an electron beam system | Douglas C. Watson | 2004-11-09 |
| 6781138 | Positioning stage with stationary actuators | Michael Kovalerchik | 2004-08-24 |
| 6765650 | Vacuum compatible air bearing stage | — | 2004-07-20 |
| 6753534 | Positioning stage with stationary and movable magnet tracks | Michael Kovalerchik | 2004-06-22 |
| 6735867 | Method of making a static pressure air bearing | Takuma Tsuda, Shinji Shinohara, Shinobu Tokushima, Yukiharu Okubo, Toshimasa Shimoda +1 more | 2004-05-18 |
| 6717159 | Low distortion kinematic reticle support | — | 2004-04-06 |
| 6674512 | Interferometer system for a semiconductor exposure system | David Stumbo, Fuyuhiko Inoue | 2004-01-06 |