Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828163 | Wafer shape evaluating method and device producing method, wafer and wafer selecting method | Makoto Kobayashi, Kazuhito Matsukawa, Hidekazu Yamamoto | 2004-12-07 |
| 6811939 | Focus monitoring method, focus monitoring system, and device fabricating method | Shuji Nakao, Yuki Miyamoto | 2004-11-02 |
| 6764794 | Photomask for focus monitoring | Shuji Nakao, Yuki Miyamoto, Naohisa Tamada | 2004-07-20 |