Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6797443 | Focus monitoring method, focus monitoring apparatus, and method of manufacturing semiconductor device | Shuji Nakao, Yuki Miyamoto | 2004-09-28 |
| 6764794 | Photomask for focus monitoring | Shuji Nakao, Yuki Miyamoto, Shinroku Maejima | 2004-07-20 |