Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6811939 | Focus monitoring method, focus monitoring system, and device fabricating method | Shuji Nakao, Shinroku Maejima | 2004-11-02 |
| 6797443 | Focus monitoring method, focus monitoring apparatus, and method of manufacturing semiconductor device | Shuji Nakao, Naohisa Tamada | 2004-09-28 |
| 6764794 | Photomask for focus monitoring | Shuji Nakao, Naohisa Tamada, Shinroku Maejima | 2004-07-20 |