Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828163 | Wafer shape evaluating method and device producing method, wafer and wafer selecting method | Makoto Kobayashi, Hidekazu Yamamoto, Shinroku Maejima | 2004-12-07 |
| 6706636 | Method of regenerating semiconductor wafer | — | 2004-03-16 |