Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770146 | Method and system for rotating a semiconductor wafer in processing chambers | Yorkman Ma, Rudy Santo Tomas Cardema, James Tsuneo Taoka, Lois Gayle Wride, Craig McFarland +1 more | 2004-08-03 |
| 6717158 | Heating device for heating semiconductor wafers in thermal processing chambers | Arnon Gat, Bob Bogart, Conor Patrick O'Carroll, Paul Janis Timans, Shuen Chun Choy +1 more | 2004-04-06 |