Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6835914 | Apparatus and method for reducing stray light in substrate processing chambers | — | 2004-12-28 |
| 6717158 | Heating device for heating semiconductor wafers in thermal processing chambers | Arnon Gat, Bob Bogart, Conor Patrick O'Carroll, Shuen Chun Choy, Zion Koren +1 more | 2004-04-06 |