Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6771895 | Heating device for heating semiconductor wafers in thermal processing chambers | Bob Bogart | 2004-08-03 |
| 6727474 | Rapid thermal processing chamber for processing multiple wafers | — | 2004-04-27 |
| 6717158 | Heating device for heating semiconductor wafers in thermal processing chambers | Bob Bogart, Conor Patrick O'Carroll, Paul Janis Timans, Shuen Chun Choy, Zion Koren +1 more | 2004-04-06 |