Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6717158 | Heating device for heating semiconductor wafers in thermal processing chambers | Arnon Gat, Bob Bogart, Paul Janis Timans, Shuen Chun Choy, Zion Koren +1 more | 2004-04-06 |