Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6770146 | Method and system for rotating a semiconductor wafer in processing chambers | Zion Koren, Yorkman Ma, James Tsuneo Taoka, Lois Gayle Wride, Craig McFarland +1 more | 2004-08-03 |