Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822977 | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser | Uwe Stamm, Gunter Nowinski | 2004-11-23 |
| 6807205 | Precise monitor etalon calibration technique | Uwe Stamm, Wolfgang Zschocke | 2004-10-19 |
| 6735225 | Chirp compensation method and apparatus | Matthias Kramer, Marcus Serwazi, Thomas Schroeder, Stefan Niedermeier | 2004-05-11 |