Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822977 | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser | Uwe Stamm, Hans-Stephan Albrecht | 2004-11-23 |
| 6700916 | E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems | Matthias Kramer, Juergen Kleinschmidt, Marcus Serwazi | 2004-03-02 |