Issued Patents 2004
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6822977 | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser | Hans-Stephan Albrecht, Gunter Nowinski | 2004-11-23 |
| 6815900 | Radiation source with high average EUV radiation output | Imtiaz Ahmad, Juergen Kleinschmidt, Guido Schriever, Sven Goetze | 2004-11-09 |
| 6807205 | Precise monitor etalon calibration technique | Hans-Stephan Albrecht, Wolfgang Zschocke | 2004-10-19 |
| 6785316 | Excimer or molecular laser with optimized spectral purity | Igor Bragin, Vadim Berger | 2004-08-31 |
| 6757315 | Corona preionization assembly for a gas laser | Igor Bragin, Vadim Berger, Ivan Tassy-Julien | 2004-06-29 |
| 6717973 | Wavelength and bandwidth monitor for excimer or molecular fluorine laser | Dirk Basting, Sergei V. Govorkov, Juergen Kleinschmidt, Peter Lokai | 2004-04-06 |
| 6714577 | Energy stabilized gas discharge laser | Igor Bragin, Wolfgang Zschocke | 2004-03-30 |