Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6763048 | Line narrowing of molecular fluorine laser emission | Klaus Vogler, Rainer Paetzel | 2004-07-13 |
| 6717973 | Wavelength and bandwidth monitor for excimer or molecular fluorine laser | Dirk Basting, Juergen Kleinschmidt, Peter Lokai, Uwe Stamm | 2004-04-06 |
| 6690703 | Molecular fluorine laser system | Klaus Vogler, Gongxue Hua, Frank Voss, Elko Bergmann | 2004-02-10 |