Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6760358 | Line-narrowing optics module having improved mechanical performance | Kay Zimmermann, Konstantin Aab, Marcus Serwazi | 2004-07-06 |
| 6735225 | Chirp compensation method and apparatus | Hans-Stephan Albrecht, Marcus Serwazi, Thomas Schroeder, Stefan Niedermeier | 2004-05-11 |
| 6700916 | E-diagnostic, laser simulator, automated testing and deconvolution of spectra for lithographic exposure radiation generating systems such as excimer or molecular fluorine laser or EUV source systems | Gunter Nowinski, Juergen Kleinschmidt, Marcus Serwazi | 2004-03-02 |