Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6795473 | Narrow band excimer laser with a prism-grating as line-narrowing optical element | Juergen Kleinschmidt | 2004-09-21 |
| 6768765 | High power excimer or molecular fluorine laser system | Rustem Osmanow, Juergen Baumler | 2004-07-27 |
| 6735225 | Chirp compensation method and apparatus | Hans-Stephan Albrecht, Matthias Kramer, Marcus Serwazi, Stefan Niedermeier | 2004-05-11 |
| 6735232 | Laser with versatile output energy | Michael Gehrke | 2004-05-11 |