Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824627 | Stepped upper electrode for plasma processing uniformity | Rajinder Dhindsa, Mukund Srinivasan, Aaron Eppler | 2004-11-30 |
| 6786175 | Showerhead electrode design for semiconductor processing reactor | Rajinder Dhindsa | 2004-09-07 |
| 6716762 | Plasma confinement by use of preferred RF return path | — | 2004-04-06 |
| 6712929 | Deformation reduction at the main chamber | Albert R. Ellingboe, Fangli Hao | 2004-03-30 |