Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824627 | Stepped upper electrode for plasma processing uniformity | Rajinder Dhindsa, Aaron Eppler, Eric H. Lenz | 2004-11-30 |
| 6714033 | Probe for direct wafer potential measurements | Konstantin Makhratchev | 2004-03-30 |