Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824627 | Stepped upper electrode for plasma processing uniformity | Mukund Srinivasan, Aaron Eppler, Eric H. Lenz | 2004-11-30 |
| 6786175 | Showerhead electrode design for semiconductor processing reactor | Eric H. Lenz | 2004-09-07 |