Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824627 | Stepped upper electrode for plasma processing uniformity | Rajinder Dhindsa, Mukund Srinivasan, Eric H. Lenz | 2004-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6824627 | Stepped upper electrode for plasma processing uniformity | Rajinder Dhindsa, Mukund Srinivasan, Eric H. Lenz | 2004-11-30 |