Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823815 | Wafer area pressure control for plasma confinement | Taejoon Han, David W. Benzing | 2004-11-30 |
| 6712929 | Deformation reduction at the main chamber | Eric H. Lenz, Fangli Hao | 2004-03-30 |