Issued Patents 2004
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823815 | Wafer area pressure control for plasma confinement | David W. Benzing, Albert R. Ellingboe | 2004-11-30 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6823815 | Wafer area pressure control for plasma confinement | David W. Benzing, Albert R. Ellingboe | 2004-11-30 |