Issued Patents 2004
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800569 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Kei Hayasaki, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2004-10-05 |
| 6719844 | Deposition method, deposition apparatus, and pressure-reduction drying apparatus | Shinichi Ito | 2004-04-13 |
| 6709531 | Chemical liquid processing apparatus for processing a substrate and the method thereof | Shinichi Ito, Riichiro Takahashi, Katsuya Okamura | 2004-03-23 |
| 6709699 | Film-forming method, film-forming apparatus and liquid film drying apparatus | Shinichi Ito, Katsuya Okumura | 2004-03-23 |