Issued Patents 2004
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6818387 | Method of forming a pattern | Kei Hayasaki, Shinichi Ito | 2004-11-16 |
| 6742944 | ALKALINE SOLUTION AND MANUFACTURING METHOD, AND ALKALINE SOLUTION APPLIED TO PATTERN FORMING METHOD, RESIST FILM REMOVING METHOD, SOLUTION APPLICATION METHOD, SUBSTRATE TREATMENT METHOD, SOLUTION SUPPLY METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD | Kei Hayasaki, Tomoyuki Takeishi, Shinichi Ito | 2004-06-01 |
| 6709531 | Chemical liquid processing apparatus for processing a substrate and the method thereof | Shinichi Ito, Tatsuhiko Ema, Katsuya Okamura | 2004-03-23 |