Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6831258 | Heating device, method for evaluating heating device and pattern forming method | Shinichi Ito, Kenji Kawano | 2004-12-14 |
| 6818387 | Method of forming a pattern | Riichiro Takahashi, Shinichi Ito | 2004-11-16 |
| 6800569 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Rempei Nakata, Nobuhide Yamada, Katsuya Okumura | 2004-10-05 |
| 6742944 | ALKALINE SOLUTION AND MANUFACTURING METHOD, AND ALKALINE SOLUTION APPLIED TO PATTERN FORMING METHOD, RESIST FILM REMOVING METHOD, SOLUTION APPLICATION METHOD, SUBSTRATE TREATMENT METHOD, SOLUTION SUPPLY METHOD, AND SEMICONDUCTOR DEVICE MANUFACTURING METHOD | Riichiro Takahashi, Tomoyuki Takeishi, Shinichi Ito | 2004-06-01 |
| 6686130 | Pattern forming method using photolithography | Shinichi Ito | 2004-02-03 |