Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6800569 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Rempei Nakata, Katsuya Okumura | 2004-10-05 |
| 6737363 | Method of manufacturing semiconductor device | Hideshi Miyajima, Nobuo Hayasaka, Nobuyuki Kurashima | 2004-05-18 |