Issued Patents 2004
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6828684 | Semiconductor device and method of manufacturing the same | Hiroshi Ikegami, Takashi Yoda, Nobuo Hayasaka, Yoshimi Hisatsune | 2004-12-07 |
| 6800569 | Film forming method, film forming apparatus, pattern forming method, and manufacturing method of semiconductor apparatus | Shinichi Ito, Tatsuhiko Ema, Kei Hayasaki, Nobuhide Yamada, Katsuya Okumura | 2004-10-05 |
| 6784092 | Method of forming insulating film and method of manufacturing semiconductor device | Hideshi Miyajima, Miyoko Shimada | 2004-08-31 |
| 6746969 | Method of manufacturing semiconductor device | Miyoko Shimada, Hideshi Miyajima, Hideto Matsuyama, Katsuya Okumura, Masahiko Hasunuma +1 more | 2004-06-08 |
| 6703302 | Method of making a low dielectric insulation layer | Hideshi Miyajima, Miyoko Shimada | 2004-03-09 |