Issued Patents 2004
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6821409 | Electroetching methods and systems using chemical and mechanical influence | Bulent M. Basol, Paul Lindquist, Homayoun Talieh | 2004-11-23 |
| 6815354 | Method and structure for thru-mask contact electrodeposition | Bulent M. Basol, Homayoun Talieh | 2004-11-09 |
| 6797132 | Apparatus for plating and polishing a semiconductor workpiece | Homayoun Talieh | 2004-09-28 |
| 6780772 | Method and system to provide electroplanarization of a workpiece with a conducting material layer | Bulent M. Basol, Homayoun Talieh | 2004-08-24 |
| 6777338 | Edge and bevel cleaning process and system | Jalal Ashjaee, Rimma Volodarsky, Bulent M. Basol, Homayoun Talieh | 2004-08-17 |
| 6773576 | Anode assembly for plating and planarizing a conductive layer | Rimma Volodarsky, Konstantin Volodarsky, Homayoun Talieh, Douglas W. Young | 2004-08-10 |
| 6768203 | Open-bottomed via liner structure and method for fabricating same | Andrew H. Simon | 2004-07-27 |
| 6716084 | Carrier head for holding a wafer and allowing processing on a front face thereof to occur | Bulent M. Basol, Konstantin Volodarsky | 2004-04-06 |
| 6709562 | Method of making electroplated interconnection structures on integrated circuit chips | Panayotis Andricacos, Hariklia Deligianni, John O. Dukovic, Daniel C. Edelstein, Wilma Jean Horkans +4 more | 2004-03-23 |
| 6695962 | Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs | Homayoun Talieh, Bulent M. Basol | 2004-02-24 |
| 6692588 | Method and apparatus for simultaneously cleaning and annealing a workpiece | Homayoun Talieh | 2004-02-17 |
| 6685814 | Method for enhancing the uniformity of electrodeposition or electroetching | Hariklia Deligianni, John O. Dukovic | 2004-02-03 |