Issued Patents 2004
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6777338 | Edge and bevel cleaning process and system | Rimma Volodarsky, Cyprian Emeka Uzoh, Bulent M. Basol, Homayoun Talieh | 2004-08-17 |
| 6736929 | Distributed control system for semiconductor manufacturing equipment | Srinivasan Komandur | 2004-05-18 |