Issued Patents 2004
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6833063 | Electrochemical edge and bevel cleaning process and system | — | 2004-12-21 |
| 6821409 | Electroetching methods and systems using chemical and mechanical influence | Cyprian Emeka Uzoh, Paul Lindquist, Homayoun Talieh | 2004-11-23 |
| 6815354 | Method and structure for thru-mask contact electrodeposition | Cyprian Emeka Uzoh, Homayoun Talieh | 2004-11-09 |
| 6802946 | Apparatus for controlling thickness uniformity of electroplated and electroetched layers | Paul Lindquist | 2004-10-12 |
| 6780772 | Method and system to provide electroplanarization of a workpiece with a conducting material layer | Cyprian Emeka Uzoh, Homayoun Talieh | 2004-08-24 |
| 6777338 | Edge and bevel cleaning process and system | Jalal Ashjaee, Rimma Volodarsky, Cyprian Emeka Uzoh, Homayoun Talieh | 2004-08-17 |
| 6722946 | Advanced chemical mechanical polishing system with smart endpoint detection | Homayoun Talieh | 2004-04-20 |
| 6716084 | Carrier head for holding a wafer and allowing processing on a front face thereof to occur | Cyprian Emeka Uzoh, Konstantin Volodarsky | 2004-04-06 |
| 6695962 | Anode designs for planar metal deposits with enhanced electrolyte solution blending and process of supplying electrolyte solution using such designs | Cyprian Emeka Uzoh, Homayoun Talieh | 2004-02-24 |